ULTRA-SENSITIVE GAS DETECTOR
for Semiconductor Manufacturing Industry
Model XD-303

Introduction:

This gas detector is an ultra-snesitive portable model designed to monitor the environmental atmosphere for the process of semiconductor devices that uses extremely toxic gases, for the safety of the workers from fluoride hydrogen and other harmful gases, and to meet the needs of the semiconductor manufacturing industry, that has been developed from the view point of high sensitivity, reliability and safety.

Further, this special gas detector series consist of 15 kinds of semiconductor gases as per table below:

Model Number
Gas Detected
Detection Range
Min. Readable Division
XD-303 AHL / AH Arsine 0 ~ 0.25 / 0 ~ 1 ppm 0.01 / 0.1 ppm
XD-303 PHL / PH Phosphine 0 ~ 0.3 / 0 ~ 1 ppm 0.01 / 0.1 ppm
XD-303 GHL / GH Germane 0 ~ 1 / 0 ~ 5 ppm 0.01 / 0.1 ppm
XD-303 SHL / SH Silane 0 ~ 5 / 0 ~ 25 ppm 0.1 / 1.0 ppm
XD-303 BH Diborane 0 ~ 1 ppm 0.1 ppm
XD-303 HCL / HC Hydrogen chlorine 0 ~ 5 / 0 ~ 25 ppm 0.1 ppm
XD-303 HF Hydrogen fluoride 0 ~ 10 ppm 0.1 ppm
XD-303 CLL / CL Chlorine 0 ~ 1 / 0 ~ 5 ppm 0.01 / 0.1 ppm

XD-303 SE

 Hydrogen selenide 0 ~ 5 ppm 0.1 ppm
Note:
A readable range of 3 ppm or 30 ppm are provided, with the accuracy subject to the above detection range, and such readings that may exceed the detection range should be considered as high concentration.

Portable type Ultra-sensitive gas leak detector.Features:

  • High sensitivity
  • Small size, light weight, compact designed, requiring a very small space and easy to carry
  • Very easy to operate microcomputer controlled, having the following functions and analog message display:
    - Auto-zeroing (Display indicates "WAIT A MOMENT" after power on)
    - Battery life (Display indicates "REPLACE BATTERY")
    - Over range (Display indicates "OVER RANGE" when the measurement exceeds the readable range)
  • The concentration is displayed simultaneously with digital numerals and bar graphic to enable reading of the variation of gas concentration.
  • An audible intermittent buzzing alarm for measurement exceeding the allowable concentration, and continuous buzzing alarm for the need of battery replacement.